摘要
With increasing challenges towards continued scaling and improve-ment in performance faced by electronic computing,mechanical com-puting has started to attract growing interests.Taking advantage of the mechanical degree of freedom in solid state devices,micro/nano-electromechanical systems(MEMS/NEMS)could provide alternative solutions for future computing and memory systems with ultralow power consumption,compatibility with harsh environments,and high reconfigurability.In this review,MEMS/NEMS-enabled memories and logic processors were surveyed,and the prospects and challenges for future on-chip mechanical computing were also analyzed.
出处
《Chip》
2023年第1期58-72,共15页
芯片（英文）
基金
We gratefully acknowledge the support from National Natural Science Foundation of China(Grants 62250073,U21A20505,U21A20459,62150052,62104029,12104086,62004026,62004032,62104140)
Sichuan Science and Technology Program(Grants 2021YJ0517,2021JDTD0028)
Fundamental Research Funds for the Central Universities(ZYGX2020ZB014 and ZYGX2020J029)
Lingang Laboratory Open Re-search Fund(Grant LG-QS-202202-11)
Biren Technology-Shanghai Jiao Tong University Joint Laboratory Open Research Fund,and Science and Technology Commission of Shanghai Municipality(STCSM)Natural Science Project General Program(Grant 21ZR1433800).
