集成电路自动测试设备的维护与保养

Maintenance and Servicing of Automatic Test Equipment of Integrated Circuit

芯片测试作为集成电路的最后一道环节,在集成电路发展的链条中处于非常重要的位置。在整个芯片测试过程中,保证芯片测试的精确性、准确性和可靠性,准确定位筛选出具有缺陷的芯片显得格外重要。为了避免因自动测试设备造成芯片测试数据的不准确性,定期对集成电路自动测试设备进行维护与保养十分重要。从工程实际出发,从计量校准、参数能力验证和设备检修方面,阐述集成电路自动测试设备的维护与保养,并对管理要求和注意事项进行了总结,为行业人员提供了有益的参考。

As the last link of integrated circuit,chip testing plays a very important role in the chain of integrated circuit development.In the whole process of chip testing,it is particularly important to ensure the accuracy and reliability of chip testing,and accurately locate and screen defective chips.In order to avoid the inaccuracy of chip test data caused by automatic test equipment,it is very important to regularly maintain the automatic test equipment of integrated circuit.Starting from the engineering practice,the maintenance of the automatic test equipment of integrated circuit is expounded from the aspects of measurement calibration,parameter capability verification and equipment maintenance,and the management requirements and matters needing attention are summarized,which provides a useful reference for the industry personnel.