基于动态全息的面内微振动测量系统

In-Plane Micro-Vibration Measurement System Based on Dynamic Holography

为了实时测量高频、微小面内振动,利用硅酸铋(BSO)晶体的光折变特性搭建了基于动态全息的面内微振动测量系统。通过粗糙表面的散射信号光携带面内振动信息,与参考光在晶体内干涉形成动态全息并实时衍射,参考光的衍射光和信号光的透射光之间形成新的干涉,通过光电探测器对干涉信号进行解时域或频域的探测,即可得到振动信息。以剪切式压电陶瓷驱动的散射片为被测物,实验测量了0.5~240 kHz的亚微米量级的面内振动。

Objective The measurement of high frequency and micro-vibration plays a critical role in multiple fields,such as nondestructive testing,micro machinery,materials science,biomedicine,and aerospace.Optical measurement methods with high accuracy,non-contact,and other advantages are widely applied to avoid device interference and damage.Compared with out-of-plane vibration measurement,in-plane vibration measurement is difficult because the measured light cannot be incident parallel to the in-plane vibration direction.Speckle interferometry is the most commonly used method for in-plane displacement measurement.However,owing to the high-speed performance limitation of the charge-coupled device(CCD)in the imaging process,its measurement frequency cannot be increased.In addition,the measured vibration surface is typically rough,leading to low measurement sensitivity for traditional laser interferometry.The dynamic holographic vibration measurement method based on a photorefractive crystal has attracted increasing attention due to advantages such as wavefront matching and low-frequency cutoff.In this study,a dynamic holographic in-plane vibration measurement system based on bismuth silicate(BSO)crystal is examined,which measures high frequency and small in-plane vibration in real time.It has strong anti-interference ability and is suitable for rough surfaces.Methods The laser beam emitted from the source is split into a reference beam and a signal beam.The signal beam carrying in-plane vibration information passes through a scatterer driven by shear piezoelectric ceramics.Both beams interfere in a BSO crystal.According to the photorefractive properties of BSO crystal,a refractive index grating is formed on the crystal which is equivalent to the interference recording in holography.The grating automatically meets the Bragg condition,and the reference beam generates Bragg diffracted beam in real time,which is equivalent to the diffraction reproduction in holography.The diffracted beam of the reference beam passing through the grating interferes with the transmitted beam of the signal beam.Vibration information can be obtained by receiving the interference signal and demodulating it through the detector.The relationship between the intensity of the diffraction signal and the light intensity ratio of the two interference beams is measured to obtain a better interference signal.A commercial out-of-plane laser vibrometer PDV100(Polytec,Germany)is used for comparison,and the feasibility of the proposed system for measuring in-plane micro-vibration is verified.The capability of the proposed system to measure high-frequency vibration is also verified by demodulating the loading frequency beyond the measurement upper limit of PDV100.To this end,the demodulation frequency is obtained directly by the spectrum analyzer.Results and Discussions First,the relationship between the intensity of the diffraction signal and the light intensity ratio of the two interference beams is measured(Fig.4).The highest diffraction efficiency is established,which obtains a better interference signal.PDV100 and the proposed system are placed in a mutually vertical structure relative to the measured object,and the out-of-plane vibration measured by PDV100 is the in-plane vibration measured by the proposed system.When the measured object is driven by sinusoidal voltage with the same frequency and different voltage(1 kHz,80-200 V),the measurement results of the proposed system demonstrate a highly linear relationship with those of PDV100(Fig.6).When the measured object is driven by sinusoidal signals with the same voltage and different frequencies(200 V,500 Hz-5 kHz),the time domain signal measurement results of both measurement systems are consistent,which verifies the feasibility of the proposed system(Fig.7).According to the relevant calibration of the PDV100 and the conversion relationship between amplitude and vibration velocity,the amplitude is 0.11μm when the vibration frequency is 5 kHz.In addition,as the upper measurement limit of the PDV100 vibrometer is 20 kHz,the in-plane vibration of 20-240 kHz is also measured.The frequency domain signals are obtained by the spectrometer(Fig.8),and the measurement results are consistent with the signal frequency loaded on the shear piezoelectric ceramics.Conclusions In contrast to out-of-plane vibration which is straightforward to measure,this paper proposes a dynamic holographic measurement system for in-plane vibration.The signal beam is modulated by the in-plane vibration of a scatterer after passing through it.The signal and reference beams form dynamic holography in a BSO crystal.Interference between the transmitted scattered beam and the diffraction beam of the reference beam occurs,and the in-plane vibration signal is obtained by demodulation of the interference signal.Photorefractive properties of the BSO crystal enable it to record dynamic holography and diffract in real time.As a result,the automatic wavefront match of the two interference beams can be achieved,which is suitable for measuring the vibration of rough surfaces.Combined with the low-frequency cutoff of BSO crystals,higher measurement sensitivity can be obtained and it is more suitable for high-frequency vibration measurement with small amplitude.The feasibility of the proposed system is verified by the comparison with the measurement results of a commercial vibrometer.With the scatterer as the object,the submicron in-plane vibration with a frequency of 240 kHz can be measured.