二维大转角光学测量系统的特性研究

Characteristics of two-dimensional large angle optical measurement system

为满足大角度快速反射镜的转角测量需求,对一种二维大角度的光学测量方法进行研究。首先搭建了二维大转角测量系统,在被测件上安装漫反射体,以红外LED作为光源,光电探测器探测反射的光强,实现角度的测量。然后对转角测量系统器件进行选型,并采用光学仿真软件基于实际参数建模,对转角测量系统进行了性能分析。最后分析了关键结构参数对系统的传感器特性影响规律,可指导转角测量系统结构参数设计。结果表明,二维转角测量系统在快反镜外壳大小为?30 mm×13 mm的约束下,在漫反射体的转角范围为±20°以内时,系统的光信号值与角度值能够保持良好的线性关系,灵敏度可达0.005 31W/(°),保证了光信号的输出。研究为二维大转角快速反射镜的转角测量系统设计提供了理论依据。

In order to meet the demand of angle measurement of large angle fast steering mirror,a two-dimensional large angle optical measurement method was studied.Firstly,a two-dimensional large angle measurement system was built,and a diffuse reflector was installed on the measured part.Infrared LED was used as the light source,and a photodetector was used to detect the reflected light intensity and realize the angle measurement.Then,the components of the angular measurement system were selected,and the performance of the angular measurement system was analyzed by using optical simulation software based on the actual parameters.Finally,the influence law of the key structural parameters on the sensor characteristics of the system was analyzed,which can guide the design of structural parameters of the angular measurement system.The results show that the optical signal value of the two-dimensional angle measurement system can maintain a good linear relationship with the angle value when the angle range of the diffuser is within±20°under the constraint of the fast steering mirror shell size of∅30 mm×13 mm,and the sensitivity of the system can reach 0.00531W/(°),ensuring the output of the optical signal.The research can provide a theoretical basis for the design of angle measurement system of two-dimensional fast steering mirror with large angle.