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Laser trimming for lithography-free fabrications of MoS_(2)devices

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摘要 Single-layer MoS_(2)produced by mechanical exfoliation is usually connected to thicker and multilayer regions.We show a facile laser trimming method to insulate single-layer MoS_(2)regions from thicker ones.We demonstrate,through electrical characterization,that the laser trimming method can be used to pattern single-layer MoS_(2)channels with regular geometry and electrically disconnected from the thicker areas.Scanning photocurrent microscope further confirms that in the as-deposited flake(connected to a multilayer area)most of the photocurrent is being generated in the thicker flake region.After laser trimming,scanning photocurrent microscopy shows how only the single-layer MoS_(2)region contributes to the photocurrent generation.The presented method is a direct-write and lithography-free(no need of resist or wet chemicals)alternative to reactive ion etching process to pattern the flakes that can be easily adopted by many research groups fabricating devices with MoS_(2) and similar twodimensional materials.
出处 《Nano Research》 SCIE EI CSCD 2023年第4期5042-5046,共5页 纳米研究(英文版)
基金 Financial supports from the National Natural Science Foundation of China(NSFC)(Nos.62011530438 and 61704129) supported by the Key Research and Development Program of Shaanxi(No.2021KW-02),the fundamental Research Funds for the Central Universities(No.JB211409 and 20109215605) the fund of the State Key Laboratory of Solidification Processing in Northwestern Polytechnical University(No.SKLSP201612) funding by European Research Council(ERC)through the project 2D-TOPSENSE(GA 755655) European Union's Horizon 2020 research and innovation program(Graphene Core2-Graphene-based disruptive technologies(No.881603) Graphene Core3-Graphene-based disruptive technologies(No.956813)) EU FLAG-ERA through the project To2Dox(No.JTC-2019-009) the Comunidad de Madrid through the project CAIRO-CM project(No.Y2020/NMT-6661) the Spanish Ministry of Science and Innovation through the project(No.PID2020-118078RB-I00).O.Ç.acknowledges the European Union's Horizon 2020 research and innovation program under the grant agreement 956813(2Exciting).S.P.acknowledges the fellowship PRE2018-084818.
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