真空100keV质子辐照对石墨膜热性能的影响

Effect of Vacuum 100 keV Proton Irradiation on Thermal Property of Graphite Films

研究了25μm石墨膜在能量100 keV最大注量2.5×10^(15)p/cm^(2)的真空质子辐照条件下的微观结构和热性能,采用拉曼光谱(Raman spectrum)、X射线衍射(XRD)、X射线光电子能谱(XPS)进行微观结构分析,采用激光闪射法(LFA)进行热性能分析。石墨膜晶面间距为0.335 83 nm,石墨化度为95.0%。结果发现,质子辐照会导致石墨膜表层产生缺陷,片层间距增大,石墨化度降低,氧含量升高;随着质子辐照注量的增加,Raman光谱中D和G峰的积分面积比表明缺陷密度不断增加。25μm石墨膜经过能量为100 keV注量为2.5×10^(15)p/cm^(2)质子辐照后,石墨膜热扩散系数无明显变化。

The microstructure and thermal property of 25μm graphite film under the condition of vacuum proton irradiation with an energy of 100 keV and a maximum fluence of 2.5×10^(15) p/cm^(2) were studied.The microstructure was analyzed by Raman,XRD and XPS methods,thermal performance was analyzed by using laser flash analysis(LFA).The interplanar spacing of the graphite film is 0.33583 nm,and the degree of graphitization is 95.0%.The results show that proton irradiation can lead to defects in the surface layer of the graphite film,the interlayer spacing increases,the degree of graphitization decreases,and the oxygen content increases;the integral area ratio of the D and G peaks in the Raman spectrum indicates an increasing defect density as the proton irradiation dose increases.The thermal diffusivity of 25μm graphite film has no obvious change after proton irradiation with energy of 100 keV and injection fluence of 2.5×10^(15) p/cm^(2).