静态真空液氮管道运用于芯片低温测试领域的改进方案分析

Analysis of Improvement Schemes for Static Vacuum Liquid Nitrogen Pipeline Applied in Low Temperature Testing of Chips

阐述通过对静态真空液氮管道系统的改进,避免管道夹层漏放气速率增加导致表面结露、结冰后产生的凝结水滴落,造成低温测试机器损坏的风险,解决排气不通畅造成低温不稳定的问题,对芯片低温测试领域液氮输送系统提供有效方案。

This paper expounds the improvement of the static vacuum liquid nitrogen pipeline system to avoid the increase in the leakage rate of the pipeline interlayer,which can cause condensation water droplets on the surface and cause damage to the low-temperature testing machine.It solves the problem of low temperature instability caused by unobstructed exhaust,and provides an effective solution for the liquid nitrogen transportation system in the field of low-temperature testing of core chips.