单晶硅拉晶炉富氩尾气回收管道腐蚀原因

Corrosion Reasons of Argon-Rich Tail Gas Recovery Pipeline for Single Crystal Silicon Pulling Furnace

通过设备运行情况分析、化学成分分析,研究了单晶硅拉晶炉富氩尾气回收管道的腐蚀原因。结果表明:引起管道腐蚀的原因是真空泵的润滑油在高温下分解产生了氟化氢、硫化氢及氯化氢等多种腐蚀性物质,这些腐蚀性物质溶于冷凝水中,并随着时间的延长逐渐累积,从而造成管道的腐蚀。通过吸附剂吸附、去离子水吸收以及优化管道的材质和壁厚解决了管道腐蚀问题。

The corrosion causes of argon-rich tail gas recovery pipeline from single crystal silicon pulling furnace were studied by means of equipment operation analysis and chemical composition analysis.The results showed that the cause of pipeline corrosion was that the lubricating oil of the vacuum pump decomposes at high temperature to produce a variety of corrosive substances such as hydrogen fluoride,hydrogen sulfide and hydrogen chloride.These corrosive substances were dissolved in condensed water and gradually accumulated with the extension of time,thus aggravating the corrosion of the pipeline.The pipeline corrosion problem was solved by adsorbent adsorption,deionized water absorption and optimization of pipeline material and wall thickness.