喷墨打印电子用功能墨水的研究进展

Research Progress of Functional Inks for Inkjet-Printed Electronics

近年来,新型电子器件对功能材料的高性能和高密度制备提出了新的要求。相较于高成本和高能耗的传统真空光刻工艺,喷墨打印技术以其所具有的高材料利用率、高图形化精度和低成本等优势在微电子制造领域具有突出竞争力。功能墨水是决定印刷电子器件性能的基础,目前各类高性能功能墨水材料的研制受到了广泛关注,发展潜力巨大。本文首先介绍了喷墨打印技术,主要包括功能墨水基本类型、高适印性墨水的基本特性和印刷薄膜后处理工艺。此外,根据不同应用领域,分别讨论了导体、半导体和绝缘体型喷墨打印功能墨水的研究进展。最后,对喷墨打印电子用功能墨水的未来发展进行展望。

Recently,novel electronic devices have put forward new requirements for high-performance and highdensity fabrication of functional materials.Compared with the traditional vacuum lithography process with high cost and high energy consumption,the inkjet printing technology is strongly competitive in the microelectronics manufacturing field with its outstanding advantages of high material utilization,high patterning accuracy and low cost.Functional ink is the basis for determining the printed electronic device performance.Currently the development of the various functional inks has received widespread attention,with great potential for development.In this paper,firstly the inkjet printing technology was introduced,mainly including the basic types of functional inks,the basic characteristics of high printability inks and the post-treatment process of the printed films.In addition,the research progress of conductor,semiconductor and insulator type inkjet printing functional inks were discussed according to different application scenarios.Finally,the future development of functional inks for inkjet printing electronics was prospected.