一种适用于介质阻挡放电型准分子灯的双极性脉冲式供电电源

A bipolar pulsed power supply suitable for dielectric barrier discharge excimer lamp

如何为介质阻挡放电(DBD)负载构建结构简单的高性能供电电源一直是DBD应用领域面临的难题。通过利用DBD负载呈容性这一特性,结合DBD负载对激励波形特殊需求的基础上,本文提出了一种适用于DBD负载的双极性脉冲式供电电源。该供电电源仅由一个直流电源、两个功率开关器件、两个二极管和一个升压变压器构成。为了在DBD负载上生成同时具有高上升率、下降率和间歇时间的高频高压双极性脉冲激励,本文设计了该供电电源的工作时序,并进行理论分析和以准分子灯为负载的实验装置来验证供电电源的可行性。实验结果表明,本文构造的供电电源不仅能在准分子灯上生成期望的脉冲激励,而且实现了所有功率开关器件工作在软开关状态。此外,本文构造的供电电源除了具有元器件少的优点,而且能实现准分子灯放电光强线性调节和充分发挥准分子灯性能的特征。

How to build a high-performance power supply with a simple structure for dielectric barrier discharge(DBD)load has always been a challenge for DBD applications.Given the capacitive nature and the special requirements of DBD load on excitation waveforms,a bipolar pulsed power supply for DBD loads is proposed in this paper.The power supply consists of only one DC voltage source,two power switching devices,two diodes,and a step-up transformer.To generate simultaneously a high-frequency and high-voltage bipolar pulse excitation with a high rising rate,falling rate,and idle time on DBD loads,the operating sequences of the power switches are planned and theoretically analyzed,and the setup with the excimer lamp as the DBD load is also constructed to test the validity of the proposed power supply.The theoretical and experimental results show that the proposed power supply can not only generate the desired pulse excitation on the excimer lamp but also realize that all power devices work in a softswitching state.In addition,the power supply has the advantages of fewer components,linear adjustment of the excimer lamp discharge light intensity,and full utilization of the potential of the excimer lamp.