摘要
通过水热法制备了纳米球状MoSe_(2)结构。使用扫描电子显微镜(SEM)对该材料的结构和形貌进行了表征。MoSe_(2)纳米球状结构形貌均匀,其直径为200~300 nm。同时,利用叉指电极制作了基于MoSe_(2)的气体传感器,并测试了其气敏性能。测试结果显示:在室温条件下,MoSe_(2)传感器具有优异的气敏性能,能检测到极低体积分数的NO_(2),对体积分数6×10^(-8)的NO_(2)的响应为1.0064,在空气中也能完全恢复。此外,该传感器还具有良好的响应/恢复特性、重复性、长期稳定性与选择性。最后结合电子转移理论,分析了MoSe_(2)气体传感器对NO_(2)气体的气敏机理。
MoSe_(2) nanosphere structure was synthesized by hydrothermal method.The structure and morphology of the sensing materials were characterized by scanning electron microscopy(SEM).MoSe_(2) microstructures exhibits uniform nanosphere shape with diameter of 200-300 nm.Meanwhile,a gas sensor based on MoSe_(2) sensing materials was fabricated using interdigital electrode,and gas sensing performance of the as-prepared sensor was tested.The test results show that MoSe_(2) sensor has excellent gas sensing performance at room temperature,can detect very low volume fraction of NO_(2),and its response to NO_(2) of 6×10^(-8)volume fraction is 1.0064.The sensor can be completely recovered in the air.Furthermore,the sensor also has good response/recovery characteristics,repeatability,long-term stability and selectivity.Finally,combining with electron transfer theory,the gas sensing mechanism of MoSe_(2) gas sensor to NO_(2) gas was analyzed.
作者
张向阳
李君
夏滔
熊长军
李廷鱼
Zhang Xiangyang;Li Jun;Xia Tao;Xiong Changjun;Li Tingyu(Center of Nano Energy and Devices,College of Information and Computer,Center University of Technology,Taiyuan 030024,China)
出处
《微纳电子技术》
CAS
北大核心
2023年第4期609-614,共6页
Micronanoelectronic Technology
基金
山西省自然科学基金面上项目(20210302123157)
国家级大学生创新创业训练计划(202110112018)。