面向压电式六维力传感器的动态建模与性能分析方法

Dynamic mathematical modeling and performance analysis for the six-axis piezoelectric force sensor

针对目前六维力传感器固有频率低、动态范围小的问题,设计了一种自预紧压电式六维力传感器结构,并对其性能进行了分析。建立了传感器动态理论数学模型,绘制了传感器灵敏度、固有频率与传感器结构参数变化相关的四维图谱,基于图谱法得到了传感器灵敏度和动态固有频率随传感器结构参数变化的规律。研制出了基于多组石英晶片的压电式六维力传感器并进行了性能测试,试验结果表明,所设计的六维力传感器固有频率为9.6 KHz,动态测量范围为3.2 KHz,大于弹性体式六维力传感器2 KHz以下的动态范围,验证了所设计六维力传感器具有更高的固有频率,更大的动态范围,可更好地满足高动态范围使用要求。

Aiming at the problems of low natural frequency and small dynamic range of the current six axis force sensor,a self-pretension piezoelectric six axis force sensor is designed and its performance is analyzed.The dynamic theoretical and mathematical model of the sensor is established,based on the established mathematical model,the changes between sensitivity,natural frequency and the sensor structural parameters of four-dimensional atlas are drawn,the variation of sensitivity and natural frequency with the structural parameters of the sensor is obtained based on method of atlas.A six-dimensional piezoelectric force sensor based on several groups of quartz wafers is developed and tested.The test results show that the designed six-dimensional force sensor has a natural frequency of 9.6 KHz and a dynamic measurement range of 3.2 KHz,which is larger than the dynamic range of the elastic six-dimensional force sensor lower than 2 KHz.It is verified that the designed six-dimension force sensor has higher natural frequency and larger dynamic range,which can meet the requirements of high dynamic range better.