超声研磨压电谐振系统设计与分析

Design and Analysis of Ultrasonic Grinding Piezoelectric Resonance System

针对目前硬脆性材料在普通研磨抛光中存在的加工效率低、加工精度不高等问题,设计了一种超声研磨压电谐振系统。基于超声振动方程和谐振设计理论,对其进行了理论分析和结构设计。通过对变幅杆尺寸优化降低了设计频率的误差,并利用有限元软件ANSYS Workbench验证了变幅杆谐振频率与超声研磨系统谐振频率的一致性,提高了整个系统的纵向谐振性能。最后对该超声研磨系统进行了阻抗和振幅试验,测试结果表明:压电振子工作时电能与机械能的转化效率较高,纵向振幅达到10.85um,符合超声研磨加工振幅要求,验证了理论设计与有限元分析的正确性。

Aiming at the low processing efficiency and low processing precision of hard and brittle materials in ordinary grinding and polishing,an ultrasonic grinding piezoelectric resonance system was designed.Based on the equation of ultrasonic vibration and the theory of resonance design,it was analyzed theoretically and designed structurally.The error of design frequency was reduced by optimizing the size of the ultrasonic horn,and the consistency between the resonant frequency of the ultrasonic horn and the resonant frequency of the ultrasonic grinding system was verified by using the finite element software ANSYS Workbench,the longitudinal resonance performance of the whole system is improved.Finally,the tests of impedance and amplitude of the ultrasonic grinding system show that the conversion efficiency of electrical energy and mechanical energy is high,the longitudinal amplitude is up to 10.85μm,which conforms to the amplitude requirement of ultrasonic grinding,and verifies the correctness of theoretical design and finite element analysis.