NMP/PVP-MWCNTs湿度传感器制备与测试

Preparation and Testing of NMP/PVP-MWCNTs Humidity Sensor

碳纳米管制备敏感薄膜时往往会因其分散性差,无法保证纳米薄膜的均匀性,从而影响传感器的性能。使用N-甲基吡咯烷酮(NMP)与聚乙烯吡咯烷酮(PVP)作为分散剂对多壁碳纳米管进行表面活性处理,制备以多壁碳纳米管为湿敏材料的电阻型湿度传感器。传感器用微机电系统(MEMS)工艺制备叉指电极作为湿敏电阻,在100℃下将多壁碳纳米水溶液组装在电极上,使用原子力显微镜(AFM)、扫描电子显微镜(SEM)对湿敏薄膜进行形貌表征。经测试,传感器线性度为0.99806,灵敏度为42.99923Ω/%,相对湿度20%~70%循环测试时响应时间为5 s,恢复时间为6 s,且传感器具有良好的重复性和稳定性。

When carbon nanotubes are used to prepare sensitive films,the uniformity of the thin films cannot be guaranteed due to the poor dispersion,which affects the performance of the sensor.Multi-walled carbon nanotubes(MWCNTS)were surfactant treated with N-Methylpyrrolidone(NMP)and polyvinylpyrrolidone(PVP)as dispersants to prepare resistive humidity sensors using MWCNTS.Micro-electromechanical system(MEMS)technology was used to fabricate the interfinger electrode as the wet-sensitive resistance.The multi-walled carbon nano-water solution was assembled on the electrode at 100℃.The morphology of the wet-sensitive film was characterized by atomic force microscope(AFM)and scanning electron microscope(SEM).After testing,the linearity of the sensor is 0.99806 and the sensitivity is 42.99923Ω/%RH.When the relative humidity is 20%~70%,the response time is 5 s and the recovery time is 6 s,and the sensor has good repeatability and stability.