分布式质量块结构高g值加速度传感器仿真分析

Simulation Analysis of Distributed Mass Block Structure for High g-value Accelerometer

针对航空航天、机电、石油等领域的高g值加速度监测需求,设计了一种分布式质量块结构的压阻式加速度传感器。运用敏感性分析和响应面方法对敏感结构模型优化,同时提升结构的固有频率和灵敏度;研究所构建模型在不同方向加速度作用下的应力分布特点,设计抗交叉干扰的传感器信号检测电路;分析结构的加工流程及封装工艺,有利于下一步制造应用。仿真结果表明:该传感器的量程为100000 g,灵敏度为2.18μV/g,一阶固有频率为157.82 kHz,理论上消除了横向交叉干扰,有效提升了传感器的性能。

A piezoresistive accelerometer with distributed mass block structure was designed to meet the monitor demand of high g-value acceleration test in the fields of aerospace,electromechanical and petroleum.Sensitivity analysis and response surface method were used to optimize the sensitive structure model and improve the natural frequency and sensitivity of the structure.The stress distribution characteristics of the model under different acceleration directions were studied and the sensor signal detection circuit against cross interference was designed.The processing flow and packaging process of the structure were analyzed to lay a foundation for the next manufacturing application.The simulation results show that the accelerometer has a range of 100000 g,a sensitivity of 2.18μV/g,and a first-order natural frequency of 157.82 kHz,which theoretically eliminates transverse cross interference and effectively improves the performance of the sensor.