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兆声波功率计的设计与应用

Design and Application of Megasonic Power Meter
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摘要 基于STM32单片机控制的兆声波功率计,主要用于喷胶机兆声波发生器功率检测。首先,进行功率计的硬件设计,采集兆声波发生器的输出电压和输出电流,经模拟乘法器芯片转换后,采用电阻-电容(Resistor-Capacitance,RC)滤波方法获得稳定输出,通过模拟/数字(Analog/Digital,A/D)转换器采样芯片转换成单片机可以识别的数字量信号。其次,经过单片机数据处理,将兆声波发生器的输出功率值显示在数码管上,同时支持上位机通过RS-232串口查询功率数据。最后,通过实验测试验证了设计的功率计达到了兆声波发生器输出功率的检测要求。 The design of megasonic power meter controlled by STM32 microcontroller is mainly used for power detection of megasonic generator of spray coater equipment.Firstly,we design the hardware of the power meter,collect the output voltage and output current of the megasonic generator,convert it through the analog multiplier chip,apply the Resistor-Capacitance(RC)filter method to obtain a stable output,through the Analog/Digital(A/D)converter,the sampling chip is used to convert into a digital signal that can be recognized by the single chip microcomputer;Secondly,the output power value of the megasonic generator is displayed on the digital tube after data processing by the single chip microcomputer.Meanwhile,the upper computer can query the power data through the RS-232 serial port.Finally,the test results show that the design of the power meter meets the requirements of the output power of the megasonic generator.
作者 邹春太 张军 ZOU Chuntai;ZHANG Jun(Shenyang Core Source Microelectronics Equipment Co.,Ltd.,Shenyang 110168)
出处 《现代制造技术与装备》 2023年第3期30-32,共3页 Modern Manufacturing Technology and Equipment
关键词 兆声波功率计 单片机 喷胶机 megasonic power meter microcontroller spray coater equipment
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