C波段6bit GaAs MMIC数控移相器的设计

Design of a C-Band 6 bit Digital Phase Shifter GaAs MMIC

基于0.15μm GaAs PHEMT工艺,设计并制备了一款C波段GaAs微波单片集成电路(Millimeter Microwave Integrated Circuit,MMIC)6位数控移相器。在片测试结果表明:移相器在4~8 GHz频段内,插入损耗≤8 dB,移相均方根误差≤5.8°,输入、输出回波损耗≥10 dB。芯片尺寸为4.40 mm×1.60 mm×0.07 mm。

Based on 0.15μm GaAs PHEMT process,a 6-bit numerical control phase shifter for C-band GaAs Microwave Integrated Circuit(MMIC)was designed and fabricated.The on-chip test results show that the insertion loss of phase shifter is less than 8 dB,the root mean square error of phase shift is less than 5.8°,and the return loss of input and output is more than 10 dB in the frequency band of 4~8 GHz.The chip size is 4.40 mm x 1.60 mm x 0.07 mm.