新型双压电制动高频压电点胶阀设计

New Type of High Frequency Jetting Dispenser withDouble Piezoelectric Brake

为了满足半导体制造与封装行业日益精密的点胶需求,课题组设计了一种新型双压电陶瓷驱动喷射点胶阀。该结构的压电陶瓷与放大杆形成90°传动角,传力效率高,销轴处采用陶瓷轴瓦从而起到自润滑作用,减少了放大机构与销轴之间的摩擦;并开展点胶阀喷射能力研究,利用ANSYS对点胶阀放大结构的位移、受力及模态进行分析;建立点胶阀工作过程的流体动力学模型,对其喷射阶段进行分析,并讨论了出胶速度与压力、撞针球径等结构参数的关系;利用FLUENT软件对喷胶过程进行二相流仿真,研究了点胶阀工作时压力及胶体喷射速度的变化过程、分析了不同进胶压力及孔径对胶体喷射速度的影响。研究结果表明该结构的输出位移、受力和共振特性均满足其基本喷射能力所需要的条件,仿真实验证明了该点胶阀结构具备高频特性。课题组提出的新型双压电制动高频压电点胶阀及其喷胶过程动力学分析方法为研究精密点胶技术提供了新思路。

In order to meet the increasingly precise dispenser needs of the semiconductor manufacturing and packaging industry,a new type of double piezoelectric driven jetting dispenser was designed.The piezoelectric of this structure formed a 90°transmission angle with the amplifier rod,which has high force transmission efficiency.The ceramic bearing bush was used at the pin shaft to play a self-lubricating role and reduce the friction between the amplification mechanism and the pin shaft.In addition,the injection capability of jetting dispenser was studied.The displacement,force and mode of the jetting dispenser amplification structure were analyzed by ANSYS.It was proved that the output displacement,force and resonance characteristics of the structure met the requirements of its basic injection capability.Furthermore,the hydrodynamic model of the jetting dispenser was established,and the injection stage was analyzed.The relationship between the dispensing speed and the structural parameters such as pressure and the diameter of the needle was discussed.Then,the two-phase flow simulation of the glue spraying process was carried out by using FLUENT,and the change process of the pressure and the glue spraying speed during the operation of the jetting dispenser was studied;The influence of different glue supply pressure and nozzle radius on the glue spray velocity was analyzed.The results show that the output displacement,stress,and resonance characteristics of the structure meet the conditions required for its basic injection capacity.The simulation study proves that the jetting dispenser structure has high frequency characteristics.The proposed new high-frequency piezoelectric jetting dispenser with double brakes and its analysis method for the dynamics of the dispenser process provide a new structure and research ideas.