催化氮化制备氮化硅研究进展

Research progress on preparation of silicon nitride by catalytic nitridation

氮化硅具有高强度、耐高温、耐腐蚀耐磨损、抗热震、抗氧化等优良性能,被广泛应用于耐火材料、冶金及航天等领域。催化氮化法是在硅粉氮化过程中引入催化剂,不仅能够实现硅粉的低温快速氮化,而且能够改变产物的形貌,促进氮化硅晶须的生成,进而改善制品的显微结构,提高其力学性能。为此,综述了金属单质和金属氧化物作为催化剂催化氮化制备氮化硅的研究进展,并展望了催化氮化制备氮化硅工艺今后的发展方向。

Silicon nitride is widely used in refractories,metallurgy,aerospace and other fields due to its excellent properties,such as high strength and good resistance to high-temperature,corrosion,wear,thermal shock and oxidation.The introduction of catalyst into the nitriding process of silicon powder by the catalytic nitriding method can not only realize the rapid nitriding of silicon powder at low temperatures,but also change the morphology of the products,promote the formation of silicon nitride whiskers,improve the microstructure of the products,and enhance the mechanical properties.The research progress on the preparation of silicon nitride by catalytic nitriding with metals and metallic oxides as catalysts was reviewed,and the future development direction was prospected.