低温等离子体用高压脉冲产生方式与研究进展

High-Voltage Pulse Generation Methods and Research Progress Used in Low-Temperature Plasma

相较于传统的交流放电驱动等离子体产生方法,脉冲放电驱动下的等离子体产生的活性粒子更为丰富、能量利用率更高、均匀性更好,逐渐成为低温等离子体驱动源领域研究的热点。目前低温等离子体用高压脉冲产生方式种类多样,本文根据高压脉冲产生原理的不同,分别对直接产生方式、压缩方式、叠加方式和脉冲形成线方式等四类主要高压脉冲产生方式进行介绍,并对它们存在的问题及发展趋势进行简要概述。

Compared with the traditional AC discharge driven plasma generation method,the plasma driven by pulsed discharge has more active particles,higher energy utilization and better uniformity,and has gradually become a research hotspot in the field of low-temperature plasma driver.At present,high-voltage pulse generation methods are various,but there is a lack of systematic combing and comparison.According to the different principles of high-voltage pulse generation,this paper introduces four main high-voltage pulse generation modes,namely direct generation mode,compression mode,superposition mode and pulse forming line mode,and briefly summarizes their existing problems and development trends.