摘要
相较于传统的交流放电驱动等离子体产生方法,脉冲放电驱动下的等离子体产生的活性粒子更为丰富、能量利用率更高、均匀性更好,逐渐成为低温等离子体驱动源领域研究的热点。目前低温等离子体用高压脉冲产生方式种类多样,本文根据高压脉冲产生原理的不同,分别对直接产生方式、压缩方式、叠加方式和脉冲形成线方式等四类主要高压脉冲产生方式进行介绍,并对它们存在的问题及发展趋势进行简要概述。
Compared with the traditional AC discharge driven plasma generation method,the plasma driven by pulsed discharge has more active particles,higher energy utilization and better uniformity,and has gradually become a research hotspot in the field of low-temperature plasma driver.At present,high-voltage pulse generation methods are various,but there is a lack of systematic combing and comparison.According to the different principles of high-voltage pulse generation,this paper introduces four main high-voltage pulse generation modes,namely direct generation mode,compression mode,superposition mode and pulse forming line mode,and briefly summarizes their existing problems and development trends.
作者
包涵春
Bao Hanchun(State Key Laboratory of Safety and Control for Chemicals,SINOPEC Research Institute of Safety Engineering Co.,Ltd.,Qingdao 266104,China)
出处
《山东化工》
CAS
2023年第8期134-139,共6页
Shandong Chemical Industry
关键词
低温等离子体
高压脉冲放电
脉冲压缩
脉冲叠加
脉冲形成线
low-temperature plasma
high voltage pulse discharge
pulse compression
pulse superposition
pulse forming line