氩气对氦-氩气体中空心阴极放电特性的影响

Effect of argon on the characteristics of hollow cathode discharge in He-Ar gas

利用流体模型,在氦-氩混合气体环境下模拟研究了氩气含量对空心阴极放电特性的影响.结果表明,随着氩气含量的增加(摩尔分数0~10%),放电电流、电子密度、氦离子密度、氩离子密度和阴极位降区径向电场强度均升高,负辉区径向电场强度和阴极位降区宽度降低.电子密度和氩离子密度的升高要快于氦离子密度的升高.当氩气摩尔分数高于5%时,氩气对于放电的贡献已经高于氦气.

In this paper,the effect of argon concentration on the characteristics of hollow cathode discharge is studied by using a fluid model in the He-Ar mixture gas.The results show that with the increase of argon mole fraction(0—10%),the discharge current,electron density,helium ion density,argon ion density,and the radial electric field in the cathode sheath region all increase.The radial electric field in the negative glow region and the width of the cathode sheath region decrease with the increase of argon concentration.The increase of electron density and argon ion density is faster than that of helium ion density.When the mole fraction of argon is higher than 5%,the contribution of argon to the discharge is higher than that of helium.