摘要
磁控溅射法是制备金属涂层的优选方法,在对小颗粒微球进行镀膜时需要微球保持较高的流化状态。微球的流化状态受沉积室的结构参数和操作参数的影响。使用离散元软件DEMSLab对沉积室的内部结构、振动间隔、表面粗糙度、转动速度、搅拌球配比等因素进行了数值模拟计算。结果表明:三角板拼接的沉积室的搅拌效果优于圆筒沉积室;大球数量的增加有助于燃料微球的均匀分布;存在合理的转速和粗糙度,使得燃料微球的分布情况最佳。后续可进行设备参数和操作参数的多变量耦合研究,使沉积室内的颗粒分布均匀。
Magnetron sputtering is the preferred method to prepare metal coatings.The microspheres need to maintain a high fluidization state when the microspheres are coated.The fluidization state of microspheres is affected by structural and operational parameters of the deposition chamber.DEMSLab software was used to numerically simulate the internal structure,vibration interval,surface roughness,rotation speed,mixing ball ratio and other factors of the deposition chamber.The results show that the mixing effect of the triangular plate is better than that of the cylinder chamber.The increase of the number of macrospheres contributes to the uniform distribution of fuel microspheres.Reasonable rotation speed and roughness make the distribution of fuel microspheres best.Subsequently,the multi-variable coupling study of equipment parameters and operating parameters can be carried out to make the particle distribution in the deposition chamber uniform.
作者
刘喆
黄杰
陈江善
黄艳芬
项学丰
薛青普
曾强
喻冲
LIU Zhe;HUANG Jie;CHEN Jiang-shan;HUANG Yan-fen;XIANG Xue-feng;XUE Qing-pu;ZENG Qiang;YU Chong(Science and Technology on Reactor Fuel and Materials Laboratory,Nuclear Power Institute of China,Chengdu,610213,China;Hi-key Technology Ltd.,Beijing 100160,China)
出处
《有色金属(冶炼部分)》
CAS
北大核心
2023年第6期78-86,共9页
Nonferrous Metals(Extractive Metallurgy)
基金
中核集团领创科研项目支持。
关键词
颗粒
离散元
分布均匀
数值模拟
particles
discrete element
uniform distribution
numerical simulation