面向硅微谐振式加速度计的高精度片上温度控制器

High Precision On-Chip Oven Controller for Silicon Micro-Resonant Accelerometer

为提高硅微谐振式加速度计在变温环境下的精度与稳定性,设计并制备了一种高精度的片上温度控制器,它由硅衬底、铂电阻加热器、测温电阻和温度控制电路组成。对温度控制器的传热模型进行理论分析,使用COMSOL对片上温度控制器进行仿真。利用微加工技术制备温度控制器,并设计实验对温控精度、长期稳定性、环境温度影响、功耗等指标进行测试。结果表明,温度控制器可以在600 s内稳定在设定温度±0.001 5℃的范围内,加速度计输出的频率波动范围为±0.03 Hz,内部温度随外界温度变化为0.012 5℃/℃,片上温度控制器的峰值功耗为100 mW。该温度控制器精度高、通用性强,适用于温度范围小、精度要求高的应用场景。

To improve the precision and stability of silicon micro-resonant accelerometer in variable temperature environment,a high precision on-chip oven controller was designed and fabricated.It consists of silicon substrate,platinum resistor heater,temperature measuring resistor and temperature control circuit.The heat transfer model of the oven controller was theoretically analyzed,and on-chip oven controller was simulated by COMSOL.The oven controller was prepared by micro-machining technology,and the experiment was designed to test the temperature control accuracy,long-term stability,influence of environmental temperature and power consumption.The results show that the temperature control system can be stable in the setting temperature range of±0.0015℃within 600 s,the frequency fluctuation range of the accelerometer output is±0.03 Hz,the internal temperature varies 0.0125℃/℃with the external temperature,and the peak power consumption of the on-chip oven controller is 100 m W.The oven controller has high precision and versatility,and is suitable for small temperature range and high precision application scenarios.