摘要
在MEMS技术受到广泛应用的趋势下,为适应未来发展的需要,以电容式压力敏感芯片为例,设计一种针对联动薄膜压力敏感芯片电容检测的测试方法,可对压力敏感芯片的输出电容做出准确测量。该测试方法涉及电路中的电容时间转换电路、时间脉宽转换电路、脉宽提取器以及数字输出电路,对各个电路模块进行电路设计论证,分析电路功能的完善性,并绘制版图,按照测试方法合并所有电路模块进行整体电路仿真及测试。实验结果表明测试方法达到设计预期。
Under the trend that MEMS technology is widely used,in order to meet the needs of future development,taking capacitive pressure sensitive chip as an example,a detection method for capacitance detection of linkage film pressure sensitive chip is designed,which can accurately measure the output capacitance of pressure sensitive chip.The method involves the capacitance-to-time conversion circuit,time-to-pulse width conversion circuit,pulse width extractor and digital output circuit.Circuit design and demonstration are carried out for each circuit module,the completeness of circuit function is analyzed,and the layout is drawn.All circuit modules are merged according to the detection method,and the overall circuit simulation and testing are carried out.The experiment results show that the dectection method meets the design expectation.
作者
刘博群
揣荣岩
LIU Boqun;CHUAI Rongyan(School of Information Science and Engineering,Shenyang University of Technology,Shenyang 110870,China)
出处
《微处理机》
2023年第3期42-45,共4页
Microprocessors
