基于组合叶列的涡轮分子泵结构优化与抽气机制研究

Research on Structure Optimization and Pumping Mechanism of Tmp Based on Combined Blade Row

为了满足涡轮分子泵精准的设计计算和抽速更大的技术要求、弥补传统的单级叶列计算算法的不足,采用真实的动叶列和静叶列组合结构模型,建立组合叶列模拟计算算法,并以对抽速影响较大的前4级组合叶列为例,开展涡轮分子泵的结构优化与抽气机制研究。研究发现:优化后的结构参数模型与原结构相比,组合叶列的最大抽速和最大压缩比分别增大了28.22%和13.99%;减小气体分子返回入口的概率、增大气体分子与下表面碰撞的概率将有利于改善涡轮分子泵的抽速。该研究从分子运动学角度揭示了涡轮叶列的抽气机理,为涡轮分子泵精准的设计和结构优化提供了新的理论依据和模拟计算算法。

In order to meet the technical requirements for accurate design calculation and higher pumping speed of turbomolecular pump(TMP)and to make up for the insufficiency of traditional single-stage blade row calculation algorithm,the real combined structure model of rotor and stator row is used to establish the combined blade row simulation calculation algorithm.The research for structure optimization and pumping mechanism of TMP is carried out by taking the first four-stage combined blade row as an example,which has a great influence on pumping speed.The study found that compared with original structure,the maximum pumping speed and maximum compression ratio of optimized blade row increased by 28.22%and 13.99%,respectively.Reducing the probability of gas molecules returning to inlet and increasing the probability of gas molecules colliding with lower surface will help improve the pumping speed of TMP.This study reveals the pumping mechanism of combined blade row from the perspective of molecular kinematics,and provides a new theoretical basis and simulation calculation algorithm for the precise design and structure optimization of TMP.