MEMS加速度传感器在地震监测中的应用综述

Review of MEMS Accelerometers Used in Seismic Monitoring

MEMS加速度传感器因为其成本低、尺寸小等特点受到了国际地震预警领域的广泛关注。首先简单介绍了MEMS传感器的特点及原理;其次,以智能手机和MEMS结合的地震预警方法、GNSS组合MEMS加速度传感器的地震监测、用于海底地震数据采集的MEMS加速度传感器和用于地震烈度监测的MEMS加速度传感器为例,阐述了MEMS加速度传感器在国内外地震预警领域的发展及应用;最后,从其特点和在地震预警中的实际应用等方面对MEMS加速度传感器在地震预警领域的应用进行展望。

Because of its low cost and small size,the mems acceleration sensor has been widely concerned in the international earthquake early warning field.This paper first briefly introduces the characteristics and principles of mems sensor;secondly,taking the smart phones and MEMS are used incombination to warn of earthquakes,GNSS combined MEMS accelerometers are used to warn of earthquakes,the MEMS accelerometers are used for seabed seismic data acquisition,and the MEMS accelerometers are used for seismic intensity monitoring as examples,the development and application of MEMS accelerometers used in the field of earthquake early warning at home and abroad are expounded.Finally,the application of MEMS accelerometer in the field of earthquake early warning is prospected from its characteristics and practical application in earthquake early warning.