摘要
引线键合强度测量具有破坏性和不可重复测试的特性,无法采用传统的测量系统分析方法对其进行分析。采用对工艺参数总体分布的特征参数的均值和标准偏差仿真的方法,选择服从相同正态分布的标准砝码作为替代样本。利用方差分析法计算引线键合强度测量系统的重复性和再现性,分析替代样本与操作者的交互作用。基于特征参数仿真的测量系统分析方法可以反映引线键合强度测量系统的精密度,降低了产线统计过程控制的成本。
The measurement of wire bonding strength is destructive and non-repeatable,which cannot be analyzed using traditional measurement system analysis methods.The method of simulating the mean value and standard deviation of characteristic parameters of the overall distribution of process parameters is adopted,and the standard weights subjected to the same normal distribution are selected as the alternative samples.The repeatability and reproducibility of the wire bonding strength measurement system are calculated using the analysis of variance method,and the interaction between the alternative samples and the operator is analyzed.The measurement system analysis method based on characteristic parameter simulation can reflect the precision of wire bonding strength measurement system and reduce the statistical process control cost of production line.
作者
牛文娟
饶张飞
刘瀚文
NIU Wenjuan;RAO Zhangfei;LIU Hanwen(Xi’an Microelectronic Technology Institute,Xi’an 710119,China)
出处
《电子与封装》
2023年第6期1-5,共5页
Electronics & Packaging
关键词
键合强度
替代样本
特征参数仿真
方差分析法
测量系统分析
bond strength
alternative samples
characteristic parameter simulation
analysis of variance method
measurement system analysis
