266 nm纳秒激光加工氧化铝陶瓷表面微孔工艺试验研究

Experimental Investigation on 266 nm Nanosecond Laser Machining of Microhole on Alumina Ceramics Surface

为探究266 nm紫外纳秒激光在氧化铝陶瓷表面加工微孔的工艺规律,通过单因素试验法和正交试验法,开展了不同激光参数对孔深、孔径及深径比的工艺试验研究。结果表明:随着激光能量增大,孔深和孔径逐渐增大、深径比逐渐减小,孔深在增长过程中存在阶段性饱和;随着脉冲数量增加,孔深和深径比逐渐增大、孔径逐渐减小;随着离焦量的绝对值增大,孔径逐渐增大、孔深和深径比减少。通过正交试验优化了工艺参数,在激光能量0.093 mJ、脉冲数量1 800个、离焦量0 mm时,可在氧化铝陶瓷表面加工出深径比超过15的微孔,这为提高纳秒激光加工氧化铝陶瓷微孔的加工质量提供了参考。

In order to explore the process law of processing microholes on the surface of alumina ceramics using 266 nm ultraviolet nanosecond laser,experimental investigations on the effects of different laser parameters on the depth,diameter and the ratio of depth and diameter were carried out using single factor test method and orthogonal test method.The result showed that the hole depth and diameter gradually increase and the ratio decreases as the laser energy increases,and there is a stage saturation of hole depth during the growth process.The hole depth and ratio gradually increase and the diameter gradually decreases as the number of pulses increases.However,it gets the opposite result as the absolute value of defocus increases.By optimizing the process parameters through orthogonal test,microholes with a ratio of depth and diameter exceeding 15 could be machined on the surface of alumina ceramics at laser energy of 0.093 mJ,pulse number of 1800 and defocus distance of 0 mm.This provides a reference for improving the machining quality of nanosecond laser processing of alumina ceramic microholes.