一种高效射频离子源的实现方法

A Realization Method of High Efficient Radio Frequency Ion Source

针对它激式射频离子源存在体积大、结构复杂、效率低、匹配速度慢的不足,提供一种高效射频离子源的实现方法,可用于电感耦合等离子体质谱仪和光谱仪。该射频离子源由频率信号源产生一定频率的正弦波信号,之后送给信号调理电路,将正弦波信号整形、差分、占空比调节后变成两路相位差为180°的矩形波信号,送给前级放大器放大后再驱动主放大器,输出的大功率信号经阻抗匹配网络加载到负载线圈,通过点火形成射频等离子体。

Aiming at the disadvantages of large volume,complex structure,low efficiency and slow matching speed of the excited radio frequency ion source,an implementation method of an efficient radio frequency ion source is provided,which can be used in an inductively coupled plasma mass spectrometer and a spectrometer.The radio frequency ion source generates a sine wave signal of a certain frequency from the frequency signal source,and then sends it to the signal condi-tioning circuit.After amplifying the pre-amplifier and then driving the main amplifier,the output high-power signal is load-ed into the load coil through the impedance matching network,and the radio frequency plasma is formed by ignition.