数字集成电路的失效分析与技术研究

Failure Analysis and Technical Research of Digital Integrated Circuits

随着社会的不断发展,集成电路应运而生,并在人们的生产和生活中扮演着重要的角色,其集成度也从最初的小规模向中、大规模演进。在集成电路生产中,硅是主要的材料,过去很长一段时间里,以硅为基础生产的集成电路占集成电路总数的90%以上。以硅为生产材料不仅可以提高集成电路的成品率,还可以缩小光刻线宽,而且单晶硅在质量和尺寸上的工艺提升,还促进了集成电路在监控技术、测量技术、制造工艺、设计技术等方面的应用发展。

With the continuous development of society,integrated circuits have emerged and play an important role in people's production and life.Its integration has also evolved from initial small-scale to medium to large-scale.In the production of integrated circuits,silicon is the main material.For a long time,integrated circuits based on silicon accounted for over 90% of the total number of integrated circuits.Using silicon as a production material can not only improve the yield of integrated circuits,but also reduce the width of photolithography lines.Moreover,the process improvement of single crystal silicon in terms of quality and size also promotes the application and development of integrated circuits in monitoring technology,measurement technology,manufacturing technology,design technology,and other aspects.