脉冲激光沉积镀膜实验虚拟仿真教学的设计与实践

Design and Practice of Virtual Simulation Teaching of Pulsed Laser Deposition Coating Experiment

薄膜制备是“实施好产业基础再造工程,打牢基础零部件”的重要基础工艺。但因薄膜制备技术存在的先进性和复杂性,给该技术的实验教学带来困扰。该文针对这一难题,采用虚拟仿真技术,创设教学情境、融入教学氛围、兼顾实验开放共享,结合“能实不虚、虚实结合、优化资源和规范流程”的原则,设计了脉冲激光沉积镀膜虚拟实验系统。该系统注重培养学生的自主学习能力,培养学生养成源头控制、过程管理和末端处理的工程实践能力。

Film preparation is an important basic process for“implementing the industrial foundation reconstruction project and laying a solid foundation for parts”.However,because of the progressiveness and complexity of the film preparation technology,the experimental teaching of this technology is troubled.In response to this difficult problem,the virtual simulation technology is used to create a teaching environment for pulsed laser deposition and coating,which includes the principle of“concrete as possible,virtualactual combination,optimize the resource and standardize the process”.The system focuses on cultivating students’autonomous learning ability and practical abilities in source control,process management and end treatment.