G-M制冷机低温泵减振设计和抽氢性能研究

Anti-vibration design and hydrogen absorption property of G-M refrigerator cryopump

本文详细介绍了G-M型制冷机低温泵冷屏和障板的热力学仿真、低温泵减振设计和抽氢性能研究。G-M型制冷机低温泵开机降温,完成减振低温泵振幅测试和抽氢性能试验。减振低温泵的泵口振幅降至±0.096μm,低温泵实际抽氢速率优于14000 L/s,与设计相符,满足客户使用需求。

In this paper,the thermodynamic simulation of the cold shield and baffle,the vibration reduction design and the hydrogen extraction performance of the cryopump of G-M refrigerator were introduced in detail.The cryopump experiments were conducted on its start up,cooling down,anti-vibration design and the hydrogen extraction performance.The vibration amplitude for the cryopump nozzle is reduced to±0.096μm,the actual hydrogen pumping speed is better than 14000 L/s,which can be consistent with the design and meet the needs of customers.