摘要
本文详细介绍了G-M型制冷机低温泵冷屏和障板的热力学仿真、低温泵减振设计和抽氢性能研究。G-M型制冷机低温泵开机降温,完成减振低温泵振幅测试和抽氢性能试验。减振低温泵的泵口振幅降至±0.096μm,低温泵实际抽氢速率优于14000 L/s,与设计相符,满足客户使用需求。
In this paper,the thermodynamic simulation of the cold shield and baffle,the vibration reduction design and the hydrogen extraction performance of the cryopump of G-M refrigerator were introduced in detail.The cryopump experiments were conducted on its start up,cooling down,anti-vibration design and the hydrogen extraction performance.The vibration amplitude for the cryopump nozzle is reduced to±0.096μm,the actual hydrogen pumping speed is better than 14000 L/s,which can be consistent with the design and meet the needs of customers.
作者
曾环
杨杨
武义锋
邓家良
Zeng Huan;Yang Yang;Wu Yifeng;Deng Jialiang(The 16th Institute of Electronics Technology Group Corporation,Hefei 230088,China;Anhui Vacree Technologies Co.Ltd.,Hefei 230088,China)
出处
《低温与超导》
CAS
北大核心
2023年第5期78-84,共7页
Cryogenics and Superconductivity
基金
国家科技重大专项(2014ZX02001)资助。
关键词
G-M型制冷机
低温泵
热力学仿真
减振设计
抽氢性能
G-M refrigerator
Cryopump
Thermodynamic simulation
Anti-vibration design
Hydrogen absorption property