摘要
采用激光诱导等离子体辅助烧蚀(LIPAA)法设计了制备表面金属化玻璃实验。该实验运用高精度光学显微镜、扫描电子显微镜对产物的结构与形貌进行表征;用X射线能谱分析仪对金属层中的元素含量及成分组成进行分析;并分别对间隙距离、靶材表面粗糙度及玻璃下表面粗糙度对玻璃表面金属化的影响进行了研究。用LIPAA法对实验进行了验证,结果表明:当间隙距离为80μm时,LIPAA实现的玻璃表面金属层厚度适中且其各元素相对含量处于稳态;同时,铜靶材表面或玻璃后表面粗糙度与金属化时玻璃表面的金属物沉积量及厚度成正比。该实验作为一种新的表面金属化工艺手段,可广泛应用于显示屏幕、光学组件及微流控芯片等领域。
Laser induced plasma assisted ablation(LIPAA)was used to prepare the metallization experiment of glass surface.The structure and morphology of the product were characterized by high-precision optical microscope and scanning electron microscope.The element content and composition in the metal layer were analyzed by X-ray energy spectrum analyzer.The effects of gap distance,target surface roughness and glass bottom surface roughness on glass surface metallization were studied.The experimental verification of LIPAA method was further carried out.The results show that when the clearance distance is 80μm,the thickness of the metal layer on the glass surface realized by LIPAA is moderate and the relative content of each element is stable;at the same time,the roughness of copper target surface or glass back surface is proportional to the amount and thickness of metal deposit on glass surface during metallization.As a new surface metallization process,this method can be widely used in display screen,optical components,microfluidic chips and other fields.
作者
姜长城
江鲲
吴智伟
梁良
JIANG Changcheng;JIANG Kun;WU Zhiwei;LIANG Liang(School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou 510641,China;National Engineering Research Center of Near-Net-Shape Forming for Metallic Materials,South China University of Technology,Guangzhou 510641,China)
出处
《实验室研究与探索》
CAS
北大核心
2023年第4期50-53,74,共5页
Research and Exploration In Laboratory
基金
广东省高等教育学会实验室管理专业委员会2019年度基金项目(GDJ2019083)
广州市高校创新创业(就业)教育资助项目(2020KC002)
华南理工大学本科教研教改资助项目(Y1190251)。
