(Ag,Ti)复合膜层的制备及光热性能研究

Preparation and Photothermal Properties of(Ag,Ti)Composite Films

采用普通钠钙玻璃作为基底材料,利用磁控溅射沉积系统制备出(Ag,Ti)复合膜,通过紫外-可见光分光光度计、自制隔热木箱对膜层透光隔热性能进行分析,采用SEM对复合膜表面形貌分析,并对复合膜进行应用于室外的耐酸碱腐蚀性测试。结果表明:Ag基膜层在溅射参数为Ag靶功率为75 W、溅射时间为0.2 min、氩气流量20 sccm、溅射压强2.1 Pa时具有最高的可见光透过率;(Ag,Ti)复合膜在不改变Ag溅射参数的情况下,Ti靶溅射功率为48 W、溅射时间0.2 min、氩气流量20 sccm、溅射压强2.1 Pa时具有较好的透光隔热性能,此时可见光透过率达到70%,隔热达到4.5℃,复合膜表面相对平整。

Using ordinary soda lime glass as the base material,(Ag,Ti)composite films were prepared by using a magnetron sputtering deposition system.The light transmission and heat insulation properties of the film were analyzed by ultraviolet visible spectrophotometer and self-made heat insulation wooden box.The surface morphology of the composite film was analyzed by SEM.The acid and alkali corrosion resistance of the composite film applied outdoors was tested.The results show that the Ag based film layer has the highest visible light transmittance when the sputtering parameters are Ag target power 75 W,sputtering time 0.2 min,argon flow rate 20 sccm,and sputtering pressure 2.1 Pa;(Ag,Ti)composite film has good light transmission and heat insulation performance when the sputtering power of Ti target is 48 W,the sputtering time is 0.2 min,the argon flow rate is 20 sccm,and the sputtering pressure is 2.1 Pa without changing the Ag sputtering parameters.At this time,the visible light transmittance reaches 70%,the heat insulation reaches 4.5℃,and the composite film surface is relatively flat.