圆盘尺寸对InP发光二极管的光谱调控

Spectral Regulation of InP Light Emitting Diode by Disk Size

片上可集成光源一直是光通信领域的研究热点。磷化铟(InP)材料是构建通信波段光源的理想材料。本文采用标准半导体工艺在InP衬底上制备了圆盘形微腔发光器件。通过制备四种尺寸的圆盘微腔发光二极管,研究了尺寸大小对于器件的性能,包括光强、半高宽、中心波长偏移等参数的影响。本研究对于电驱动光源的制备和实现通信波段的光通信具有重要意义。

The on-chip integrated light source has always been a research hotspot in the field of optical communication.Indium phosphide(InP)material is an ideal material for constructing communication band light source.In this paper,InP-based microcavity light emitting devices are fabricated on InP substrate by standard semiconductor technology.By preparing four kinds of disk microcavity light emitting diodes,the influence of size on the performance of the device,including light intensity,full width at half maximum,center wavelength shift,etc.is investigated.This research may be of great significance for the preparation of electric-driven light source and the realization of optical communication in communication band.