3D线激光检测封装陶瓷平面度研究

Research on 3D Line Laser Detection of Ceramic Flatness in Packaging

使用线扫描激光可以得到工件样品的点云数据描述工件的三维空间信息,通过对工件的三维空间信息的处理可以用来测量工件的平面度与尺寸。通过随机采样一致性(RANSAC,Random Sample Consensus)点云分割算法,提取出陶瓷的主平面。而后为了尽可能消除点云平面与工艺基准面的不重合,计算并提取出拟合平面的单位法向量,随后利用罗德里格斯公式求得法向量旋转至垂直与视觉平台的旋转矩阵,实现点云倾斜度矫正。而平面度的评定则采用最小区域评定法,同时与其他测量手段进行对比。

This paper uses line scanning laser to obtain point cloud data of workpiece samples to describe the three-dimensional spatial information of the workpiece.By processing the three-dimensional spatial information of the workpiece,it can be used to measure flatness and size of workpiece.Extract the main plane of ceramics using RANSAC point cloud segmentation algorithm.Then,in order to make the point cloud plane coincide with the process datum plane,the unit normal vector of the fitting plane is calculated and extracted,and then the rotation matrix of the normal vector rotated to the vertical and the visual platform is obtained by using the Rodrigues formula to realize the tilt correction of the point cloud.The evaluation of flatness adopts the minimum area evaluation method,while comparing the measurement methods of other tools.