一种高灵敏度电容式波动陀螺的设计与分析

Design and analysis of a capacitive wave gyroscope with high-sensitivity

基于固体波动陀螺灵敏度高、可靠性好、动态范围宽等突出优点,本文研究了一种全新的高灵敏度电容式微机电环形波动陀螺。首先设计了微机电环形波动陀螺的敏感结构与整体结构,并分析了工作特性与敏感原理;其次建立了环形敏感结构的灵敏度数值模型,分析了灵敏度与主要设计参数的关系;最后对环形敏感结构进行了模态仿真、静电驱动分析、灵敏度分析与极限位移分析,得到了该微机电环形波动陀螺的谐振频率为6.036 0 kHz,在2.906 8μm的驱动激励下机械灵敏度为0.003 6μm/°,最大静态应力为19.82 MPa。分析结果表明该陀螺敏感结构设计合理,能够实现高灵敏度的角速度敏感,为进一步研制高灵敏度MEMS陀螺奠定了基础。

In this paper,a new capacitive MEMS ring-shaped wave gyroscope with high sensitivity is studied,Based on the outstanding advantages of the solid wave gyroscope such as high sensitivity,good reliability and wide dynamic range.First,the sensitive part and the whole structure of this MEMS ring-shaped wave gyroscope are designed,and the working characteristics and sensitive principle are analyzed.Then,the numerical model of the ring-shaped sensitive part is established,and the relationship between the sensitivity and the main design parameters is studied.Finally,it is concluded that the resonant frequency is 6.036 0 kHz,the mechanical sensitivity is 0.003 6 μm/° with a driving displacement of 2.906 8 μm,and the maximum stress is 19.79 MPa in the ultimate displacement of the gyroscope,by studying the motion mode,driving method,mechanical sensitivity and ultimate displacement of the ring sensitive structure.The results show that the sensitive structure of the gyroscope is reasonable and has a high sensitivity,it can be used as the basis for the further development of high sensitivity MEMS gyroscope.