M50钢表面磁控溅射Ti-GLC薄膜高温摩擦学性能

High Temperature Tribological Properties of Ti-GLC Coatings on M50 Steel Substrate by Magnetron Sputtering

为了研究高温环境下轴承钢基体上Ti掺杂类石墨碳基薄膜的实际应用,采用非平衡磁控溅射技术在M50钢表面制备Ti-GLC膜,分别在不同温度、不同线速度下与Al2O3陶瓷球进行摩擦磨损试验,研究其高温摩擦学性能及磨损机理。结果表明,随着温度的升高,Ti-GLC膜中的sp2键含量逐渐增大,石墨化程度加重,硬度和弹性模量逐渐降低,膜基结合力也有所降低。在室温~200℃,所制备的Ti-GLC薄膜保持优异的低摩擦与耐磨损性能,为Ti-GLC薄膜的最佳服役温度区域。在200 mm/s下,随着温度的升高,磨损形式由轻微的黏着磨损和磨粒磨损逐渐转变为严重的磨粒磨损和氧化磨损。

In order to study the application of Ti doped graphite-like carbon(GLC)films on bearing steel substrate at high temperature,Ti-GLC coatings were prepared on M50 steel substrate by unbalanced magnetron sputtering.Friction and wear tests were performed with Al2O3 ceramic balls at different temperatures and different sliding speeds to investigate the high temperature tribological properties and wear mechanism.The results show that the content of sp2 increased with the temperature increase.Meanwhile,the hardness and elastic modulus decreased gradually,the adhesion force displayed a slight downtrend.In the range between RT and 200℃,the prepared Ti-GLC films maintain excellent low friction and wear resistance,therefore is the best service temperature range.At 200 mm/s,the wear mechanism gradually change from slight adhesive wear and abrasive wear to severe abrasive wear and oxidation wear with the increasing temperature.