摘要
为满足微机电系统(micro-electro-mechanical system,MEMS)二维激光扫描系统对显微物镜小入瞳直径、大入射角度、大视场的要求,利用光学设计软件Zemax设计了一款入瞳直径为1.1 mm,可匹配MEMS二维振镜±18°大扫描角度的近红外无限共轭微型显微物镜。该物镜总长小于23 mm,数值孔径为0.4,分辨率为1.26μm,工作距为900μm,各项像差校正良好,满足使用需求。设计结果表明,该微型显微物镜可满足便携式皮肤检测仪器的MEMS二维振镜激光扫描系统的应用要求。
In order to meet the requirements of micro-electro-mechanical system(MEMS)twodimensional laser scanning system for microscope objective with small entrance pupil diameter,large incident angle and large field of view,a near-infrared infinite conjugate microscope objective with an entrance pupil diameter of 1.1 mm and a large scanning angle of±18°is designed by using optical design software Zemax.The total length of the objective lens is less than 23 mm.The numerical aperture reaches 0.4 and the resolution is 1.26μm.The working distance is 900μm.The aberration correction is good.The designed microscope objective can meet the needs of use.The results show that the microscope objective can meet the requirements of MEMS two-dimensional galvanometer laser scanning system for portable skin detection instruments.
作者
王兴宇
杨照清
薛萌
郭汉明
WANG Xingyu;YANG Zhaoqing;XUE Meng;GUO Hanming(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Shanghai Key Laboratory of Modern Optical System,University of Shanghai for Science and Technology,Shanghai 200093,China)
出处
《光学仪器》
2023年第3期74-79,共6页
Optical Instruments
基金
上海市地方能力建设项目(21010502900)。
关键词
光学设计
显微物镜
近红外
大视场
MEMS振镜
optical design
microscope objective
near infrared
large field of view
MEMS galvanometer
