热振子式双轴MEMS角速度陀螺敏感机理的研究

Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro

该文给出了一种热振子式双轴微机电系统(MEMS)角速度陀螺的敏感机理。在给出双轴敏感原理、热振子的振动模态和陀螺效应的基础上,对敏感结构内的温度场进行了计算。结果表明,开机1.8 s后在敏感结构内形成了一个稳定的温度场;当有角速度加载时,热振子随着输入角速度而移动,造成温度场偏移,两个正交Y(X)方向上对称设置的两热线温差ΔTY(ΔTX)随着输入角速度ax(ay)的加大呈现线性增长,x、y轴平均温度灵敏度为121 mK/(°)/s;根据输入-输出ω_(x)-V_(Yout)和ω_(y)-V_(Xout)特性曲线得到数学模型,从而揭示了敏感机理,x、y轴平均灵敏度为0.091 mV/(°)/s,平均非线性度为1.86%,平均交叉耦合为2.3%。该文为优化结构奠定了实用理论基础。

The sensitivity mechanism of a thermal oscillator type biaxial MEMS angular velocity gyro was revealed.The temperature field inside the sensitive structure was calculated on the basis of the biaxial sensitivity principle,the vibration mode of the thermal oscillator and the gyroscopic effect.The results show that:A stable temperature field is formed inside the sensitive structure after 1.8 s of power-on.When there is angular velocity loading,the thermal oscillator moves with the input angular velocity,causing the temperature field to shift,and the temperature differenceΔT Y(ΔT X)S between the two hot lines set symmetrically in the two orthogonal Y(X)directions shows a linear growth with the increase of the input angular velocity a x(a y),and the average temperature sensitivity of x and y axes is 121 mK/(°)/s.According to the input-outputω_(x)-V_(Yout)andω_(y)-V_(Xout)characteristic curves,the mathematical model is obtained and the sensitive mechanism is revealed.The average sensitivity of x and y axes is 0.091 mV/(°)/s,the average nonlinearity is 1.86%,and the average cross-coupling is 2.3%.This paper provides a practical theoretical foundation for the optimized structure.