高铝玻璃基聚四氟乙烯镀膜微槽模具的研究

Study on Micro Groove mould of PTFE Coating High Aluminum Glass Substrate

针对当前微槽模具压印中粘接和纹路变形问题,本文以高铝玻璃为基体,把光刻、刻蚀、镀膜等半导体芯片制造技术,用于微槽模具的制备。结果表明,与Eu胶微槽模具相比,镀聚四氟乙烯膜的高铝玻璃模具的寿命提高了40%,压印的产品轮廓清晰,成形精度高,成品率也提高了3个百分点。制造微槽模具的聚四氟乙烯,发挥了结构性作用。制成的模具也可用于压制其他金属与非金属表面的微观装饰图案等。

In order to solve problems of adhesion and grain deformation in micro groove mould imprinting,the paper takes high aluminum glass as the matrix,and uses semiconductor preparation technology such as photolithography,etching and coating to prepare micro groove mould.The results show that effective duration of high aluminum glass mould with polytetrafluoroethylene film is 40%longer than that of Eu glue micro groove mould,the product contour is clear,the forming precision is high,and the pass rate is increased by 3%.Polytetrafluoroethylene,which is used to make micro groove mold,plays a structural role.The mould can be used to imprint micro decorative patterns on other metals and nonmetals surface.