MEMS微热板研究进展

Research progress of MEMS micro-hotplate

随着微纳加工技术的不断进步,传感器逐渐向微型化、低功耗、低成本发展。采用微机电系统(MEMS)工艺制备的微热板作为加热和支撑平台,为敏感材料提供稳定的加热温度。因此,微热板的热性能和机械性能是研制过程中重点关注的问题。本文从微热板的基本原理出发,讨论了微热板结构设计和电极几何形状的技术发展,并对微热板国内外研究现状和关键性能参数进行了总结评价。

With the continuous progress of micro-nano processing technology,sensors are gradually developing towards miniaturization,low power consumption and low cost.The micro-hotplate prepared based on MEMS process acts as a heating and supporting platform to provide stable heating temperature for sensitive materials.Therefore,the thermal and mechanical properties of the micro-hotplate are the key issues in the development process.Started from basic principle of micro-hotplate,the structural design of micro-hotplate and technological development of geometrical shape of electrode are discussed,and the research status at home and abroad and key performance parameters of the micro-hotplate are summarized and evaluated.