基于Fabry-Perot的高灵敏度局部放电检测传感器

High-sensitivity partial discharge detection sensor based on Fabry-Perot

提出了一种用于局部放电检测的高灵敏度微型光纤法布里—珀罗(F-P)传感器。利用MEMS技术由单模光纤端面和具有波纹结构的氮化硅(Si3N4)膜构成。实验分析了传感器不同膜片结构的性能。结果表明:所提出的传感器1 kHz声信号下,声压为38.86 mPa时,信噪比为80.18 dB,最小可探测声压为3.07μPa/Hz1/2。此外,该传感器具有平坦的频率响应和线性的声压响应,同时具有极高的灵敏度和微小的尺寸,适合局部放电的检测实际应用。

A high-sensitivity miniature optical fiber Fabry-Perot(F-P)sensor for partial discharge detection is presented.The sensor is composed of a single-mode fiber end face and a silicon nitride(Si_(3)N_(4))film with a corrugated structure using MEMS technology.The performane of sensor with different membrane structures is analyzed by experiment.Experimental results show that the sensor has a signal-to-noise ratio of 80.18 dB under 1 kHz sound signal and sound pressure of 38.86 mPa,and the minimum detectable sound pressure is 3.07μPa/Hz^(1/2).In addition,the sensor has a flat frequency response and a linear sound pressure response,as well as extremely high sensitivity and a small size,which is very suitable for practical application of partial discharge detection.