洁净材料在腐蚀性湿电子化学品生产中的应用

Application of clean materials in the production of corrosive wet electronic chemicals

半导体加工和制程技术的进步对其配套原料的品质提出了更高要求。为获得纯度更高的湿电子化学品,洁净材料的选择至关重要。从生产核心区域和公用工程区域两部分介绍了洁净材料在腐蚀性湿电子化学品中的选择和应用,其中生产核心区域主要采用含氟聚合物,包含聚四氟乙烯(PTFE)、可溶性聚四氟乙烯(PFA)、偏氟乙烯均聚物(PVDF)等;公用工程区域主要采用不锈钢和工程塑料。

The advancement of semiconductor processing and process technology has put forward higher requirements for the quality of its supporting raw materials.The selection of clean materials is crucial for obtaining higher purity wet electronic chemicals.The selection and application of clean materials in corrosive wet electronic chemicals from two parts:the production core area and the public engineering area are introduced.The production core area mainly uses fluoropolymers,including polytetrafluoroethylene(PTFE),fusible polytetrafluoroethylene(PFA),and vinylidene fluoride homopolymer(PVDF).The public engineering area mainly uses stainless steel and engineering plastics.