摘要
With the increasing demand for processing massive amounts of data and information in the post-Moore era,higher demands are being placed on the performance of integrated circuits(ICs).Miniaturizing the size of transistors and increasing their integration has been the main driver for the development of ICs in recent decades.However,the development of traditional silicon-based ICs has reached a bottleneck due to the limits of the miniaturization of silicon-based materials.
