电子洁净室高架地板阻力特性及风机布置形式研究

Resistance characteristics of elevated floor and fan layouts in electronic clean room

为研究电子洁净室高架地板的阻力性能及空气洁净度等级要求较高的风机布置形式,建立高架地板物理模型并对参数进行合理设置,在洁净室断面风速为0.30~0.45 m/s的工况下,对开孔率分别为17%和25%的高架地板的阻力特性进行数值模拟及试验验证,并基于高架地板阻力性能对不同风机布置方式下气流组织进行模拟研究。结果表明:在相同风速工况下,开孔率越小,高架地板阻力越大,且风速越大阻力增加越大,开孔率为25%和17%的高架地板阻力的模拟值与测量值最大误差分别为6.4%和10.0%;建议采用满布或者90%布置率的风机布置形式,洁净室内气流较均匀。

In order to study resistance characteristics of elevated floor and fan layouts satisfying higher air cleanliness level in electronic clean room,the physical model of elevated floor is established and reliable parameter setting is done.The resistance characteristics of elevated floor with open porosities of 17%and 25%under the cross section wind velocity of 0.30 m/s to 0.45 m/s in clean room are simulated,and the results are verified by test.Based on the resistance performance of elevated floor,the air distribution under different fan layouts is simulated.The results show that under the same wind velocity condition,the smaller open porosity has higher resistance of elevated floor,and the resistance increases with the wind velocity increasing.The maximum errors between the simulation and tested values of elevated floor resistance with open porosities of 25%and 17%are 6.4%and 10.0%respectively.It is recommended to apply the FFU with full or 90%distribution ratio,so as to obtain more uniform flow inside the clean room.