一种差分杠杆结构的硅微谐振加速度计设计与实现

Design and Implementation of Silicon Micro-resonant Accelerometer with Differential Leverage Structure

硅微谐振加速度计是一种测量载体运动加速度的微机电惯性仪表,是地震勘探应用领域的重要工具之一。现有加速度计标度因数普遍偏低,直接影响所在地震检波器系统的分辨率。文中设计一种差分杠杆结构的硅微谐振加速度计,利用微杠杆结构放大质量块的惯性力,以提高标度因数指标,为地震勘探领域硅微谐振加速计设计提供参考。

Silicon micro resonant accelerometer is a micro electromechanical inertial instrument used to measure the acceleration of carrier motion,and is one of the important tools for the field of seismic exploration applications.The scale factor of existing accelerometers is generally low,which directly affects the resolution of the Geophone system.This paper designs a silicon micro resonant accelerometer with a differential lever structure,which amplifies the inertial force of the mass block using the micro lever structure to improve the scale factor index and provide reference for the design of silicon micro resonant accelerometers in the field of seismic exploration.