扫描电镜测量镀膜玻璃膜层厚度的不确定度评定

Uncertainty Evaluation on Measurement of Film Thickness of Coated Glass by Scanning Electron Microscope

为了解扫描电镜测量结果的准确度,采用扫描电镜对光伏镀膜玻璃膜层厚度进行测量,对影响测量结果的不确定度分量包括重复性测定、设备分辨率、人员标记、标准样品、试验环境条件等逐一进行讨论,并对各影响因素的不确定度分量进行计算和合成,计算扩展不确定度。测量过程执行标准GB/T 20307—2006《纳米级长度的扫描电镜测量方法通则》。测量不确定度的评定结果表明:影响不确定度的来源主要有重复性测定、设备分辨率、人员标记、标准样品四方面,试验环境条件影响可以忽略。不确定度报告可表示为:测量值为117.7 nm,扩展不确定度U=7.5 nm,包含因子k=2。

In order to understand the accuracy of the measurement results of scanning electron microscope,the thickness of photovoltaic coating glass film was measured by scanning electron microscope.The uncertainty components affecting the measurement results,including repeatability measurement,equipment resolution,human labeling,standard sample and test environmental conditions,were discussed one by one.The uncertainty components of each influencing factor were calculated and synthesized to calculate the expanded uncertainty.The measurement process follows the standard GB/T 20307-2006'General rules for scanning electron microscopy measurement of nanometer length'.The evaluation results of measurement uncertainty show that the sources of uncertainty mainly include repeatability measurement,equipment resolution and human labeling,standard sample and the influence of test environmental conditions can be ignored.The uncertainty report can be expressed as:the measured value is 117.7 nm,the expanded uncertainty U=7.5 nm,and the inclusion factork=2.