真空紫外光技术制备致密非晶态ZnO薄膜

Preparation of Densely Amorphous ZnO Thin Films by Vacuum Ultraviolet Technology

以六水合硝酸锌为原料,乙酰丙酮为配体剂,无水乙醇为溶剂,氨水为添加剂,制备了乙酰丙酮锌络合物前驱体溶液。以掺氟氧化锡导电玻璃为基底,将前驱体溶液旋涂到基底,在干燥的氮气气氛中,经波长为172 nm的真空紫外光照射5分钟后,可以对前驱体薄膜中的金属有机前躯体进行光化学分解,形成氧化锌薄膜。采用紫外吸收光谱、傅里叶变换红外光谱、X射线光电子能谱、X射线衍射、以及扫描电镜对薄膜进行表征和分析。结果表明,有机配体在真空紫外光光照5分钟内迅速分解和缩聚,生成无针孔、高致密的ZnO薄膜。

A precursor solution of acetylacetone zinc complex was prepared using zinc nitrate hexahydrate as raw material,acetylacetone as ligand,anhydrous ethanol as solvent,and ammonia as additive.With the conductive glass doped with tin fluoride oxide as the substrate,the precursor solution is spin coated on the substrate.In the dry nitrogen atmosphere,the metal organic precursor in the precursor film can be photochemical decomposed to form zinc oxide film after being irradiated by vacuum ultraviolet light with wavelength of 172 nm for 5 minutes.The thin films were analyzed using ultraviolet absorption spectroscopy,Fourier transform infrared spectroscopy,X-ray photoelectron spectroscopy,X-ray diffraction,and scanning electron microscopy.The results showed that the organic ligands were rapidly decomposed and condensed within 5 minutes to form a pinhole-free,highly dense ZnO thin film.