织构和涂层改善表面黏附性能的试验研究

Experimental Investigation of Texturing and Coating on Improving the Surface Adhesive Characteristics

通过电感耦合等离子体刻蚀技术和磁控溅射制膜技术制备了具有圆柱状织构和类金刚石DLC涂层的硅片样品,使用原子力显微镜和三维表面轮廓仪表征了样品表面的形貌特征,基于原子力显微镜并采用胶状探针考察了织构和涂层样品表面的黏附行为。结果表明:织构化样品表面的黏附作用显著依赖于探针和样品表面之间的接触位置,且在织构间距相同时,织构直径越大,黏附力变化的偏差越大;圆柱状织构和DLC涂层均能减小硅片表面的黏附力,但圆柱状织构的减黏效果显著高于DLC涂层;表面织构和低表面能涂层的组合是减小黏附的推荐方式。

Samples with micro-pillars and diamond-like carbon(DLC)coating were prepared on the silicon surface by the inductively coupled plasma(ICP)etching technique and the magnetron sputtering technology.The surface morphology of samples was measured by the atomic force microscope(AFM)and the three-dimensional surface profiler.Adhesive characteristics of the textured and coated samples were detected using AFM and the colloidal probe.Experimental results show that the adhesion interaction of textured samples depends remarkably on the contact location between the probe and the sample,and the deviation of adhesion force is larger for surfaces with larger textures when the texture interval is fixed.Furthermore,the adhesion force of the silicon surface can be reduced by either the pillar texture or the DLC coating.However,the adhesion-reduction effect of the pillar texture is more significant than the DLC coating.The recommended method for reducing adhesion is to combine the surface texture and the coating with low surface energy.